Electronic part mounting substrate and method for producing same

ABSTRACT

In a method for producing an electronic part mounting substrate wherein a heat sinking metal base plate  12  is bonded to one side of a ceramic substrate  10,  and one side of a circuit forming metal plate  14  is bonded to the other side thereof, an electronic part  16  being mounted on the other side of the circuit forming metal plate  14,  the ceramic substrate  10  and the electronic part  16  are arranged in a mold so that the ceramic substrate  10  is spaced from the electronic part  16,  and then, a molten metal is injected into the mold so that the molten metal contacts both sides of the ceramic substrate  10  and the electronic part  16.  Then, the mold is cooled to solidify the molten metal, to form a heat sinking metal base plate on one side of the ceramic substrate  10  so that the heat sinking metal base plate is bonded directly to the one side of the ceramic substrate  10,  and to form a circuit forming metal plate on the other side of the ceramic substrate  10  so that one side of the circuit forming metal plate is bonded directly to the other side of the ceramic substrate  10.  When the circuit forming metal plate is formed, the electronic part is bonded directly to the other side of the circuit forming metal plate.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention generally relates to an electronic part mountingsubstrate and a method for producing the same. More specifically, theinvention relates to an electronic part mounting substrate wherein anelectronic part, such as a semiconductor chip, is mounted on ametal/ceramic bonding substrate, and a method for producing the same.

2. Description of the Prior Art

In recent years, power modules are used for controlling heavy-currentfor electric vehicles, electric railcars, machine tools and so forth. Ina conventional power module, a metal/ceramic insulating substrate isfixed to one side of a metal plate or compound material called baseplate by soldering, and a semiconductor chip is fixed to themetal/ceramic insulating substrate by soldering. On the other side(reverse) of the base plate, a radiating fin or cooling jacket of ametal is mounted via a thermal conduction grease by means of screws.

Since the soldering of the base plate and semiconductor chip to themetal/ceramic insulating substrate is carried out by heating, the baseplate is easy to warp due to the difference in coefficient of thermalexpansion between bonding members during soldering. Heat generated fromthe semiconductor chip passes through the metal/ceramic insulatingsubstrate, solder and base plate to be radiated from the radiating finor cooling jacket to air or cooling water. Therefore, if the base platewarps during soldering, clearance increases when the radiating fin orcooling jacket is mounted on the base plate, so that there is a problemin that heat sink characteristics extremely deteriorate. Moreover, sincethe thermal conductivity of the solder itself is low, power modules forheavy-current are desired to have more improved heat sinkcharacteristics.

In order to solve such a problem, there is proposed a metal/ceramiccircuit board wherein a base plate of aluminum or an aluminum alloy isbonded directly to a ceramic substrate without soldering the base plateto the ceramic substrate (see, e.g., Japanese Patent Laid-Open No.2002-76551).

In the metal/ceramic circuit board disclosed in Japanese PatentLaid-Open No. 2002-76551, it is not required to solder the base plate tothe metal/ceramic insulating substrate, so that thermal conductivity isimproved therebetween. However, it remains being required to solder asemiconductor chip to the metal/ceramic circuit board.

In recent years, it is desired to use lead-free solders. Thus, it isalso desired to use a lead-free solder when an electronic part, such asa semiconductor chip, is mounted, by soldering, on the metal/ceramiccircuit board disclosed in Japanese Patent Laid-Open No. 2002-76551.However, if a high-temperature solder must be used for soldering thepart, it is difficult to use a lead-free solder since an alternativelead-free material having characteristics equal to or better than thoseof conventional high-temperature solders has not been developed.

If an electronic part, such as a semiconductor chip, is fixed by meansof a solder, heat sink characteristics are insufficient since thethermal conductivity of the solder is insufficient. In addition, voidsare easily produced, so that there are some cases where heat sinkcharacteristics and reliability deteriorate. Moreover, there are somecases where it is required to improve solder wettability by plating ametal plate before the electronic part is mounted on the metal plate bysoldering, so that production costs increase.

SUMMARY OF THE INVENTION

It is therefore an object of the present invention to eliminate theaforementioned problems and to provide an electronic part mountingsubstrate capable of mounting an electronic part, such as asemiconductor chip, on a metal/ceramic bonding substrate without usingany solders, and a method for producing the same.

In order to accomplish the aforementioned and other objects, theinventors have diligently studied and found that it is possible to fixan electronic part, such as a semiconductor chip, to a metal/ceramicbonding substrate without using any solders, if the electronic part isbonded directly to one side of a metal plate for a circuit when theother side of the metal plate is bonded directly to one side of aceramic substrate. Thus, the inventors have made the present invention.

According one aspect of the present invention, there is provided amethod for producing an electronic part mounting substrate wherein ametal member is bonded to one side of a ceramic substrate, and one sideof a metal plate is bonded to the other side of the ceramic substrate,an electronic part being mounted on the other side of the metal plate,the method comprising the steps of: arranging a ceramic substrate and anelectronic part in a mold so that the ceramic substrate is spaced fromthe electronic part; injecting a molten metal into the mold so that themolten metal contacts both sides of the ceramic substrate and theelectronic part; cooling the mold to solidify the molten metal, to forma metal member on one side of the ceramic substrate so that the metalmember is bonded directly to the one side of the ceramic substrate, andto form a metal plate on the other side of the ceramic substrate so thatone side of the metal plate is bonded directly to the other side of theceramic substrate; and bonding the electronic part directly to the otherside of the metal plate when the metal plate is formed.

In this method for producing an electronic part mounting substrate, theelectronic part may be made of a material which does not produce anyalloys or compounds with the molten metal. The electronic part may be asemiconductor chip, a resistor chip or a capacitor chip. The electronicpart is preferably an SiC chip. The molten metal may be molten aluminumor a molten aluminum alloy.

The above described method may further comprise the steps of: taking abonding substrate, wherein the ceramic substrate, the metal member, themetal plate and the electronic part are integrated with each other, outof the mold; and thereafter, forming an etching resist on a surface ofthe metal plate to form a circuit on the metal plate by etching. In thiscase, the etching may be carried out after the metal plate is machined.

According to another aspect of the present invention, there is provideda method for producing a power module, comprising the steps of: mountinga casing having electrodes on an electronic part mounting substratewhich is produced by the above described method for producing anelectronic part mounting substrate and wherein the electronic part is asemiconductor chip; connecting the electrodes of the casing to thesemiconductor chip; and filling an insulating material in the casing.

According to a further aspect of the present invention, an electronicpart mounting substrate comprises: a ceramic substrate; a metal memberbonded to one side of the ceramic substrate; a metal plate, one side ofwhich is bonded to the other side of the ceramic substrate; and anelectronic part bonded directly to the other side of the metal plate.

In this electronic part mounting substrate, the electronic part may bebonded to the other side of the metal member when the metal plate isformed by solidifying a molten metal. The electronic part may be bondedto the other side of the metal plate without using any solders. Theelectronic part may be made of a material which does not produce anyalloys or compounds with the molten metal. The electronic part may be asemiconductor chip, a resistor chip or a capacitor chip. The electronicpart is preferably an SiC chip. The metal member and the metal plate maybe made of aluminum or an aluminum alloy.

According to a still further aspect of the present invention, a powermodule comprises: the above described electronic part mountingsubstrate, wherein the electronic part is a semiconductor chip; a casinghaving electrodes, the casing being mounted on the electronic partmounting substrate, the electrodes of the casing being connected to thesemiconductor chip; and an insulating material filled in the casing.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be understood more fully from the detaileddescription given herebelow and from the accompanying drawings of thepreferred embodiments of the invention. However, the drawings are notintended to imply limitation of the invention to a specific embodiment,but are for explanation and understanding only.

In the drawings:

FIG. 1 is a sectional view schematically showing a preferred embodimentof an electronic part mounting substrate according to the presentinvention;

FIG. 2 is a sectional view of a mold for use in the preferred embodimentof a method for producing an electronic part mounting substrateaccording to the present invention;

FIG. 3 is a sectional view schematically showing a power module usingthe preferred embodiment of an electronic part mounting substrateaccording to the present invention;

FIG. 4 is a sectional view of a mold used for producing the power moduleusing the preferred embodiment of an electronic part mounting substrateaccording to the present invention;

FIG. 5A is a plan view of a lower mold member of a mold for producing abonding article for use in an electronic part mounting substrate inExample 1;

FIG. 5B is a sectional view taken along line VB-VB of FIG. 5A;

FIG. 5C is a sectional view of a bonding article produced by the mold ofFIG. 5A;

FIG. 6A is a plan view of a lower mold member of a mold for producing abonding article for use in an electronic part mounting substrate inExample 2;

FIG. 6B is a sectional view of the lower mold member taken along lineVIB-VIB of FIG. 6A, which also shows a cross section of an upper moldmember covering the lower mold member to form the mold;

FIG. 6C is a sectional view of a bonding article produced by the mold ofFIG. 6B;

FIG. 7A is a sectional view of a mold for producing a bonding articlefor use in an electronic part mounting substrate in Example 3; and

FIG. 7B is a sectional view of a bonding article produced by the mold ofFIG. 7A.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Referring now to the accompanying drawings, the preferred embodiment ofan electronic part mounting substrate and a method for producing thesame according to the present invention will be described below.

As shown in FIG. 1, an electronic part mounting substrate in thispreferred embodiment comprises: a ceramic substrate 10; a heat sinkingmetal base plate 12 of aluminum or an aluminum alloy, which is bondeddirectly to one side of the ceramic substrate 10; a circuit formingmetal plate 14 of aluminum or an aluminum alloy, which is bondeddirectly to the other side of the ceramic substrate 10; and electronicparts 16 bonded directly to the circuit forming metal plate 14.

The direct bonding between the ceramic substrate 10 and the heat sinkingmetal base plate 12, the direct bonding between the ceramic substrate 10and the circuit forming metal plate 14, and the direct bonding betweenthe circuit forming metal plate 14 and the electronic parts 16 arecarried out by cooling a molten metal which is injected into a mold 100shown in, e.g., FIG. 2.

As shown in FIG. 2, the mold 100 comprises a lower mold member 102 andan upper mold member 104. The lower mold member 102 comprises a bottomportion 102 a having a rectangular planar shape, and a side wall portion102 b extending from the peripheral edge portion of the bottom portion102 a upwards in a direction perpendicular to the bottom portion 102 a.The top surface of the bottom portion 102 a of the lower mold member 102has a recessed portion 102 c which has a step-wise extending side wall.The recessed portion 102 c comprises: one or a plurality of electronicpart housing portions 102 d (only two electronic part housing portions102 d are shown in FIG. 2), each of which substantially has the sameshape and size as those of a corresponding one of the electronic parts16; one or a plurality of metal circuit plate forming portions 102 e(only one metal circuit plate forming portion 102 e is shown in FIG. 2),each of which is formed above the electronic part housing portions 102 dso as to be adjacent thereto and each of which substantially has thesame shape and size as those of the circuit forming metal plate 14; andone or a plurality of ceramic substrate housing portions 102 f (only oneceramic substrate housing portion 102 f is shown in FIG. 2), each ofwhich is formed above the metal circuit plate forming portion 102 e soas to be adjacent thereto and each of which substantially has the sameshape and size as those of the ceramic substrate 10. Of a space definedby putting the upper mold member 104 having a substantially rectangularplanar shape on the lower mold member 102, a portion other than therecessed portion 102 c of the lower mold member 102 defines a heatsinking metal base plate forming portion 102 g having a shapecorresponding to the shape of the heat sinking metal base plate 12.Furthermore, the upper mold member 104 has a molten metal inlet (notshown) for injecting a molten metal into the mold 100. The lower moldmember 102 has a molten metal passage (not shown) extending between theheat sinking metal base plate forming portion 102 g and the metalcircuit plate forming portion 102 e, so as to allow the heat sinkingmetal base plate forming portion 102 g to be communicated with the metalcircuit plate forming portion 102 e if the ceramic substrate 10 ishoused in the ceramic substrate housing portion 102 f.

First, the electronic parts 16 are housed in the electronic part housingportions 102 d of the lower mold member 102 of the mold 100, and theceramic substrate 10 is housed in the ceramic substrate housing portion102 f thereof. Then, a molten metal is injected into the heat sinkingmetal base plate forming portion 102 g to be filled in the metal circuitplate forming portion 102 e via the molten metal passage (not shown).Thereafter, the molten metal is cooled to be solidified, so that it ispossible to produce an electronic part mounting substrate wherein theceramic substrate 10, the heat sinking metal base plate 12, the circuitforming metal plate 14 and the electronic parts 16 are bonded to andintegrated with each other.

By thus bonding the electronic parts 16 directly to the circuit formingmetal plate 14 of aluminum or an aluminum alloy without using anysolders, it is possible to enhance thermal conductivity to improve heatsink characteristics. In addition, it is difficult to produce voidswhich are easily produced when a solder is used, and the thermalconductivity of aluminum or an aluminum alloy is higher than that ofsolders, so that it is possible to improve heat sink characteristics andreliability. In addition, it is not required to use any high-temperaturesolders which are difficult to be lead-free solders, so that theelectronic part mounting substrate can be lead-free. Moreover, it is notrequired to plate the circuit forming metal plate 14 in order to improvesolder wettability. Furthermore, the electronic parts 16 may be anyelectronic parts, such as semiconductor chips, resistor chips andcapacitor chips, unless they are reacted with a molten metal to produceany alloys or compounds.

Referring to the accompanying drawings, a power module using a preferredembodiment of an electronic part mounting substrate and a method forproducing the same according to the present invention will be describedbelow.

As shown in FIG. 3, this power module comprises: a ceramic substrate 10;a heat sinking metal base plate 121 with cooling fins, which is bondeddirectly to one side of the ceramic substrate 10 and which is made ofaluminum or an aluminum alloy; a circuit forming metal plate 14 which isbonded directly to the other side of the ceramic substrate 10 and whichis made of aluminum or an aluminum alloy; semiconductor chips 161, suchas SiC chips, which are bonded directly to the circuit forming metalplate 14; a casing 18 which is mounted on the heat sinking metal baseplate 12 so as to surround the ceramic substrate 10, the circuit formingmetal plate 14 and the semiconductor chips 161; aluminum wires 20 whichconnect the semiconductor chips 161 to the electrodes 19 of the casing18; and an insulating resin 22 which is filled in the casing 18.

The direct bonding between the ceramic substrate 10 and the heat sinkingmetal base plate 12, the direct bonding between the ceramic substrate 10and the circuit forming metal plate 14, and the direct bonding betweenthe circuit forming metal plate 14 and the semiconductor chips 16 arecarried out by cooling a molten metal which is injected into a mold 200shown in, e.g., FIG. 4.

As shown in FIG. 4, the mold 200 comprises a lower mold member 202 andan upper mold member 204. The lower mold member 202 comprises a bottomportion 202 a having a rectangular planar shape, and a side wall portion202 b extending from the peripheral edge portion of the bottom portion202 a upwards in a direction perpendicular to the bottom portion 202 a.The top surface of the bottom portion 202 a of the lower mold member 202has a recessed portion 202 c which has a step-wise extending side wall.The recessed portion 202 c comprises: one or a plurality ofsemiconductor chip housing portions 202 d (only two semiconductor chiphousing portions 202 d are shown in FIG. 4), each of which substantiallyhas the same shape and size as those of a corresponding one of thesemiconductor chips 161; one or a plurality of metal circuit plateforming portions 202 e (only one metal circuit plate forming portion 202e is shown in FIG. 4), each of which is formed above the semiconductorchip housing portions 102 d so as to be adjacent thereto and each ofwhich substantially has the same shape and size as those of the circuitforming metal plate 14; and one or a plurality of ceramic substratehousing portions 202 f (only one ceramic substrate housing portion 202 fis shown in FIG. 4), each of which is formed above the metal circuitplate forming portion 202 e so as to be adjacent thereto and each ofwhich substantially has the same shape and size as those of the ceramicsubstrate 10. The upper mold member 204 comprises: an upper mold body204 a having a substantially rectangular planar shape; and a pluralityof fin forming portions 204 b which extend downwards from the bottomsurface of the upper mold body 204 a in a direction perpendicularthereto and which are spaced at regular intervals to extend in parallelto each other. Of a space defined by putting the upper mold member 204on the lower mold member 202, a portion other than the recessed portion202 c of the lower mold member 202 defines a heat sinking metal baseplate forming portion 202 g having a shape corresponding to the shape ofthe heat sinking metal base plate 121 with cooling fins. Furthermore,the upper mold member 204 has a molten metal inlet (not shown) forinjecting a molten metal into the mold 200. The lower mold member 202has a molten metal passage (not shown) extending between the heatsinking metal base plate forming portion 202 g and the metal circuitplate forming portion 202 e, so as to allow the heat sinking metal baseplate forming portion 202 g to be communicated with the metal circuitplate forming portion 202 e if the ceramic substrate 10 is housed in theceramic substrate housing portion 202 f.

First, the semiconductor chips 161 are housed in the semiconductor chiphousing portions 202 d of the lower mold member 202 of the mold 200, andthe ceramic substrate 10 is housed in the ceramic substrate housingportion 202 f thereof. Then, a molten metal is injected into the heatsinking metal base plate forming portion 202 g to be filled in the metalcircuit plate forming portion 202 e via the molten metal passage (notshown). Thereafter, the molten metal is cooled to be solidified, so thatthe ceramic substrate 10, the heat sinking metal base plate 121, thecircuit forming metal plate 14 and the semiconductor chips 161 can bebonded to and integrated with each other.

Examples of an electronic part mounting substrate and a method forproducing the same according to the present invention will be describedbelow in detail.

EXAMPLE 1

First, as shown in FIGS. 5A and 5B, a carbon mold having a lower moldmember 300 was prepared as a mold. The lower mold member 300 has abottom portion 300 a having a substantially rectangular planar shape.The top surface of the bottom portion 300 a of the lower mold member 300has two recessed portions 300 b which are spaced from each others by 10mm and each of which has a step-wise extending side wall. Each of therecessed portions 300 b comprises: two semiconductor chip housingportions 300 c, each of which substantially has the same shape and sizeas those of a semiconductor chip having a size of 10 mm×10 mm×1.5 mm soas to be capable of housing therein the semiconductor chip; metalcircuit plate forming portions 300 d, each of which is formed above thecorresponding semiconductor chip housing portions 300 c so as to beadjacent thereto and each of which is capable of forming a circuitforming metal plate having a size of 39 mm×39 mm×0.4 mm on thesemiconductor chip; and two ceramic substrate housing portion 300 e,each of which is formed above the metal circuit plate forming portion300 d so as to be adjacent thereto and each of which substantially hasthe same shape and size as those of a ceramic substrate having a size of40 mm×40 mm×0.635 mm so as to be capable of housing therein the ceramicsubstrate above the metal circuit plate forming portion 300 d. When anupper mold member (not shown) having a substantially rectangular planarshape is put on the lower mold member 300, there is formed a heatsinking metal base plate forming portion 300 f having such a shape andsize that a heat sinking metal base plate having a size of 110 mm×60mm×5 mm can be formed on the ceramic substrate so as to be adjacentthereto. Furthermore, the upper mold member of the mold has a moltenmetal inlet (not shown) for injecting a molten metal into the mold. Thelower mold member 300 has a molten metal passage (not shown) extendingbetween the heat sinking metal base plate forming portion 300 f and themetal circuit plate forming portion 300 d, so as to allow the heatsinking metal base plate forming portion 300 f to be communicated withthe metal circuit plate forming portion 300 d if the ceramic substrateis housed in the ceramic substrate housing portion 300 e.

Then, four SiC chips having a size of 10 mm×10 mm×1.5 mm were housed inthe semiconductor chip housing portions 300 c of the lower mold member300 of the mold, and two aluminum nitride substrates having a size of 40mm×40 mm×0.635 mm were housed in the ceramic substrate housing portions300 e thereof. Then, the lower mold member 300 was covered with theupper mold member to be put in a furnace, and the atmosphere in thefurnace was caused to be a nitride atmosphere having an oxygenconcentration of 100 ppm or less. In this state, molten aluminum havinga purity of 4N was injected into the mold while removing oxide films byapplying a pressure by means of a carbon cylinder (not shown).Thereafter, the mold was cooled to solidify aluminum, and further cooledto a room temperature. Thus, as shown in FIG. 5C, there was produced abonding article wherein one side of each of two ceramic substrates 304was bonded directly to an aluminum base plate 302 having a size of 110mm×60 mm×5 mm, and one side of a circuit forming aluminum plate 306having a size of 39 mm×39 mm×0.4 mm was bonded directly to the otherside of each of the ceramic substrates 304, two SiC chips 308 beingbonded directly to the other side of each of the circuit formingaluminum plates 306, and then, the bonding article was taken out of themold.

Thereafter, an etching resist having a predetermined shape was printedon the surface of each of the circuit aluminum plates 306 to carry outan etching process with an aqueous ferric chloride solution to form acircuit pattern, and then, the resist was removed.

With respect to the bonding article thus obtained, the bonding interfacebetween the SiC chip 308 and the aluminum circuit plate 306, the bondinginterface between the aluminum circuit plate 306 and the ceramicsubstrate 304, and the bonding interface between the ceramic substrate304 and the aluminum base plate 302 were examined by an ultrasonicdetector. Then, no bonding failure was detected, and no crack wasobserved on the ceramic substrate 304.

With respect to the bonding article, after heat cycles (in one heatcycle, the article was held at −40° C. for 30 minutes, at 25° C. for 10minutes, at 125° C. for 30 minutes, and at 20° C. for 10 minutes) wererepeatedly carried out three thousands times, each of the abovedescribed bonding interfaces was examined by the ultrasonic detector.Then, no bonding failure was detected, and no crack was observed on theceramic substrate 304.

EXAMPLE 2

As shown in FIG. 6C, after a bonding article was produced by the samemethod as that in Example 1, using a mold 400 (see FIGS. 6A and 6B)comprising a lower mold member 400 a and an upper mold member 400 b forproducing the same bonding article as that in Example 1, except that acircuit forming metal plate 406 was bonded to one side of a ceramicsubstrate 404 and that a heat sinking metal plate 402 having a size of39 mm×39 mm×1.0 mm was bonded on the other side thereof, the sameetching process as that in Example 1 was carried out.

With respect to the bonding article thus obtained, the bonding interfacebetween the SiC chip 408 and the aluminum circuit plate 406, the bondinginterface between the aluminum circuit plate 406 and the ceramicsubstrate 404, and the bonding interface between the ceramic substrate404 and the aluminum heat sink plate 402 were examined by an ultrasonicdetector. Then, no bonding failure was detected, and no crack wasobserved on the ceramic substrate 404.

With respect to the bonding article, after the same heat cycles as thosein Example 1 were repeatedly carried out three thousands times, each ofthe above described bonding interfaces was examined by the ultrasonicdetector. Then, no bonding failure was detected, and no crack wasobserved on the ceramic substrate 404.

EXAMPLE 3

As shown in FIG. 7B after a bonding article was produced by the samemethod as that in Example 1, using a mold 500 (see FIG. 7A) forproducing the same bonding article as that in Example 1, except that aplurality of fins having a width of 3 mm and a height of 10 mm wereformed at an interval of 10 mm on the reverse of a heat sinking metalbase plate, the same etching process as that in Example 1 was carriedout.

With respect to the bonding article thus obtained, the bonding interfacebetween the SiC chip 508 and the aluminum circuit plate 506, the bondinginterface between the aluminum circuit plate 506 and the ceramicsubstrate 504, and the bonding interface between the ceramic substrate504 and the aluminum base plate 502 were examined by an ultrasonicdetector. Then, no bonding failure was detected, and no crack wasobserved on the ceramic substrate 504.

With respect to the bonding article, after the same heat cycles as thosein Example 1 were repeatedly carried out three thousands times, each ofthe above described bonding interfaces was examined by the ultrasonicdetector. Then, no bonding failure was detected, and no crack wasobserved on the ceramic substrate 504.

As described above, according to the present invention, it is possibleto produce an electronic part mounting substrate wherein electronicparts, such as semiconductor chips, are mounted on a metal/ceramicbonding substrate without using any solders.

While the present invention has been disclosed in terms of the preferredembodiment in order to facilitate better understanding thereof, itshould be appreciated that the invention can be embodied in various wayswithout departing from the principle of the invention. Therefore, theinvention should be understood to include all possible embodiments andmodification to the shown embodiments which can be embodied withoutdeparting from the principle of the invention as set forth in theappended claims.

1-6. (canceled)
 7. An electronic part mounting substrate comprising: aceramic substrate; a metal member bonded to one side of said ceramicsubstrate; a metal plate, one side of which is bonded to the other sideof said ceramic substrate; and an electronic part bonded directly to theother side of said metal plate.
 8. An electronic part mounting substrateas set forth in claim 7, wherein said electronic part is bonded to theother side of said metal member when said metal plate is formed bysolidifying a molten metal.
 9. An electronic part mounting substrate asset forth in claim 7, wherein said electronic part is bonded to theother side of said metal plate without using any solders.
 10. Anelectronic part mounting substrate as set forth in claim 7, wherein saidelectronic part is made of a material which does not produce any alloysor compounds with said molten metal.
 11. An electronic part mountingsubstrate as set forth in claim 7, wherein said electronic part is asemiconductor chip, a resistor chip or a capacitor chip.
 12. Anelectronic part mounting substrate as set forth in claim 7, wherein saidelectronic part is an SiC chip.
 13. An electronic part mountingsubstrate as set forth in claim 7, wherein said metal member and saidmetal plate are made of aluminum or an aluminum alloy.
 14. A powermodule comprising: an electronic part mounting substrate as set forth inclaim 7, wherein said electronic part is a semiconductor chip; a casinghaving electrodes, said casing being mounted on said electronic partmounting substrate, said electrodes of the casing being connected tosaid semiconductor chip; and an insulating material filled in saidcasing. 15-16. (canceled)